Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage actuation speed. Three-dimensional electromechanical modeling including many non-linearities has been performed to study some static but mainly dynamic features. The results show that the involved parameters have influences speed voltage: lower length, higher thickness as well density Young’s modulus material diminish time, while longer smaller thickness, reduce voltages. Shorter times voltages cannot be obtained optimized simultaneously. Different such Au, Ag, Cu, Ti, Ni, Al, W, Cr, Ta, Mo artificial are studied compared. In study, Al is found best for achieving shorter design rules derived considering large variety parameters. Many discussed in detail influencing dynamics. Finally, related existing experimental optical shutters cantilevers.